Multiple filament enhanced ion source

Details Multiple filament enhanced ion source Multiple filament enhanced ion source

1993-03-19

1995-08-01

Pascal, Robert J.

Electric lamp and discharge devices: systems

With cathode or cathode heater supply circuit

31511181, 31323141, H01J 724

Patent

active

054382386

ABSTRACT:
An improved ion source is provided with multiple filaments and wiring for selectively connecting various combinations of filaments to a current source. In one embodiment an additional filament is a spare filament which is connected to the current source when the primary filament burns out. This decreases down time due to filament replacement. In another embodiment, an additional filament operates simultaneously with a primary filament to provide a more homogenous electron cloud and to increase filament life.

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