Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-04-04
2006-04-04
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S055000, C355S067000
Reexamination Certificate
active
07023522
ABSTRACT:
An exposure apparatus including a first exposure device for illuminating a predetermined mask with light of a predetermined wavelength under a first mask-illumination condition, to print a first pattern on a predetermined exposure region, and a second exposure device for illuminating the predetermined mask with light of the predetermined wavelength under a second mask-illumination condition, different from the first mask-illumination condition, to superposedly print a second pattern on the predetermined exposure region where the first pattern has been printed. A first exposure by the first exposure device and a second exposure by the second exposure device are carried out simultaneously, prior to a development process.
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Kawashima Miyoko
Sugita Mitsuro
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