Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1996-09-27
1999-07-20
Dougherty, Thomas M.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
310319, H01L 41113
Patent
active
059259728
ABSTRACT:
A sensor device adapted to detect at least one of a particle and a bubble in a fluid, includes a fluid nozzle defining a center of fluid flow; and a plurality of sensor elements for converting an impact of one of a particle and a bubble into an electrical signal, wherein a first sensor element is arranged closer to the center of fluid flow than a second sensor element. The sensor device includes a number of diaphragm sensor elements each having a sufficiently small mass for responding to a collision with the particle, and an apparatus for converting a vibration of the diaphragm portion into an electrical signal so as to detect the vibration. The multiple elements are arranged in the fluid flow stream such that different size particles will preferentially strike different elements.
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Eckerle Joseph S.
Frohbach Hugh F.
Marlow John P.
Pelrine Ronald E.
Shibata Kazuyoshi
Dougherty Thomas M.
NGK Insulators Ltd.
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