Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Means for analyzing liquid or solid sample
Reexamination Certificate
1999-01-12
2001-09-25
Warden, Jill (Department: 1743)
Chemical apparatus and process disinfecting, deodorizing, preser
Analyzer, structured indicator, or manipulative laboratory...
Means for analyzing liquid or solid sample
C422S068100, C422S082020, C422S082030, C422S083000, C422S098000, C204S400000, C204S412000, C204S415000, C204S416000, C204S431000, C204S433000
Reexamination Certificate
active
06294133
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a detecting apparatus for physical phenomenon and/or chemical phenomenon, and more particularly to a detecting apparatus of physical phenomenon and/or chemical phenomenon capable of detecting plural physical phenomena and/or chemical phenomena almost simultaneously on the same substrate. The physical phenomena and chemical phenomena can include temperature, light in a wider sense of meaning (visible light, ultraviolet ray, infrared ray, X-ray, electromagnetic wave, etc.), ion concentration, magnetism, pressure, acceleration, speed, sound wave, ultrasonic wave, oxidation-reduction potential, rate of reaction, and other various phenomena.
2. Description of Related Art
These physical phenomena or chemical phenomena were hitherto observed individually by using individual detector elements, such as a temperature sensor, photo sensor, physical characteristics sensor, and chemical sensor, which converted the detected measurements into various electric signals (current, voltage, resistance, capacity, potential).
For example, in the case of a pyroelectric sensor known as a typical thermal sensor, when the temperature changes, an electric charge is generated in the pyroelectric element, and its potential change is amplified by an FET (field effect transistor), and subsequently read. In the case of a photo diode known as a representative photo sensor, the electric charge generated by light is taken out as an electric current. In the case of a pressure sensor utilizing the piezo-resistance effect known as a representative physical sensor, the resistance change by pressure is read. In measurement of pH by using an ISFET (ion sensitive field effect transistor) known as a representative chemical sensor, as hydrogen ions are absorbed on a response membrane, the channel conductance changes, and by measuring the current flowing in the FET, the pH value of a solution is measured.
Further, imaging has been attempted by arranging these various sensors parallel in two-dimensional directions, and acquiring the output distribution simultaneously. A representative example thereof is a solid state imaging device. In this device, a plurality of photo diodes are arranged two-dimensionally, the electric charge generated in the photo diodes depending on the intensity distribution of incident light is accumulated in the internal capacity for a specific time, and the signals are gated to the outside in a time series at specific time intervals by using a charge transfer device or MOS transistor array.
However, generally in any one of these sensors and devices, signals or distributions of plural physical phenomena and/or chemical phenomena at the same time and in the same place could not be observed.
OBJECTS AND SUMMARY OF THE INVENTION
The invention is devised in light of the above background, and it is hence an object thereof to provide a detecting apparatus of physical phenomenon and/or chemical phenomenon (hereinafter called phenomenon detecting apparatus), capable of observing plural physical phenomena and/or chemical phenomena occurring at a same or almost same time, and in a same or almost same place.
To achieve the object, the phenomenon detecting apparatus of the present invention includes phenomenon detecting units for detecting physical phenomena and/or chemical phenomena for incorporating electric signals of two or more physical phenomena and/or chemical phenomena at least almost simultaneously, disposed on one side of an integral semiconductor substrate.
According to the phenomenon detecting apparatus thus constituted, electric output signals (current, voltage, charge, etc.) of plural physical phenomena and/or chemical phenomena occurring at a same or almost same time, and in a same or almost same place can be obtained, so that the mutual actions of hitherto unknown physical phenomena and/or chemical phenomena can be known and recorded. By knowing two or more physical phenomena and/or chemical phenomena simultaneously, phenomena, such as relationships between the measured properties, not found by an existing single detecting devices may be discovered.
By arranging the phenomenon detecting units one-dimensionally or two-dimensionally, a distribution of physical phenomena and/or chemical phenomena may be known. Further, since outputs of these phenomenon detecting units are electric output signals, such as current, voltage, and charge, by accumulating the outputs for a specific time, the outputs of the individual phenomenon detecting units can be taken out in time series. As a result, it is easier to incorporate the outputs into a television screen or computer, so that two-dimensional distribution of physical phenomena and/or chemical phenomena may be observed at high sensitivity and high definition.
A detector assembly for measuring individually pressure, temperature, and light can be formed on an integral semiconductor substrate. A diaphragm of an n-type monocrystalline silicon layer and an SiO
2
insulator layer can bridge across separate positions of a silicon base to provide a pressure sensitive structure. A plurality of transistors and a gate can be formed on the substrate and a pyroelectric element can be mounted on the diaphragm. The substrate can further be constructed to provide an integral photodiode for measuring light. The diaphragm is responsive to changes in pressure, while the pyroelectric element can measure temperature.
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Mimura Susumu
Nakanishi Tsuyoshi
Sawada Kazuaki
Tanabe Hiroki
Tomita Katsuhiko
Handy Dwayne K
Horiba Ltd.
Price and Gess
Warden Jill
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