Multiple density mask and fabrication thereof

Details Multiple density mask and fabrication thereof Multiple density mask and fabrication thereof

1987-01-02

1988-09-13

Rutledge, L. Dewayne

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428667, 428674, 428675, 428677, 428680, B32B 1500

Patent

active

047709472

ABSTRACT:
A multi-layer structure that includes a transparent dielectric substrate, a layer of a nickel-containing steel alloy, and a layer of copper and/or chrome.

REFERENCES:
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4411972 (1983-10-01), Narken et al.
patent: 4512863 (1985-04-01), Criss et al.
patent: 4563400 (1986-01-01), Criss et al.
Cook, et al., "Multilayer Semitransparent Photomask", IBM Technical Disclosure Bulletin, vol. 15, No. 5, Oct. 1972, pp. 1465-1466.
Abolafia, et al., "Dual-Density Mask for Photoresist", IBM Technical Disclosure Bulletin, vol. 19, No. 12, May 1977, p. 4539.

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