Multiple degrees of freedom motion system

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C073S782000

Reexamination Certificate

active

08072120

ABSTRACT:
A multiple degrees of freedom motion system comprising an arrangement of rigid stages, flexure constraint modules, actuators, and sensors. These components of the motion system are arranged and connected in a systematic fashion to provide a high degree of decoupling between the motion axes, suitable placement of ground-mounted actuators to actuate each motion axis, and suitable placement of sensors to allow end-point measurement along each motion axis. This arrangement of rigid stages, flexure constraint modules, actuators and sensors enables large motion range and high motion quality in the motion system, while using standard and commonly available components.

REFERENCES:
patent: 5832783 (1998-11-01), Sheldon
patent: 5987726 (1999-11-01), Akeel
patent: 6193226 (2001-02-01), Davies
patent: 6402329 (2002-06-01), Bailly et al.
patent: 6688183 (2004-02-01), Awtar et al.

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