Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-12-11
2010-10-12
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07812965
ABSTRACT:
The disclosure features multiple degree-of-freedom interferometers (e.g., non-dispersive interferometers) for monitoring linear and angular (e.g., pitch and/or yaw) displacements of a measurement object with compensation for variations in the optical properties of a gas in the interferometer measurement (and/or reference) beam paths. The disclosure also features interferometry systems that feature an array of interferometers (e.g., including one or more multiple degree-of-freedom interferometer), each configured to provide different information about variations in the optical properties of the gas in the system. Multiple degree-of-freedom interferometers are also referred to as multi-axis interferometers.
REFERENCES:
patent: 4685803 (1987-08-01), Sommargren
patent: 4688940 (1987-08-01), Sommargren et al.
patent: 4733967 (1988-03-01), Sommargren
patent: 4948254 (1990-08-01), Ishida
patent: 5404222 (1995-04-01), Lis
patent: 5537209 (1996-07-01), Lis
patent: 5552888 (1996-09-01), Sogard et al.
patent: 5764362 (1998-06-01), Hill et al.
patent: 5838485 (1998-11-01), de Groot et al.
patent: 6137574 (2000-10-01), Hill
patent: 6198574 (2001-03-01), Hill
patent: 6201609 (2001-03-01), Hill
patent: 6246481 (2001-06-01), Hill
patent: 6252668 (2001-06-01), Hill
patent: 6330065 (2001-12-01), Hill
patent: 6407816 (2002-06-01), de Groot et al.
patent: 6430465 (2002-08-01), Cutler
patent: 6495847 (2002-12-01), Asano et al.
patent: 6529279 (2003-03-01), de Groot et al.
patent: 6573996 (2003-06-01), Deliwala et al.
patent: 6757066 (2004-06-01), Hill
patent: 6765195 (2004-07-01), Leviton
patent: 6775009 (2004-08-01), Hill
patent: 6778280 (2004-08-01), de Groot et al.
patent: 6806961 (2004-10-01), Hill
patent: 6819434 (2004-11-01), Hill
patent: 6839141 (2005-01-01), Hill
patent: 6842256 (2005-01-01), Hill
patent: 6888638 (2005-05-01), Hill
patent: 6891624 (2005-05-01), Hill
patent: 6937349 (2005-08-01), Jones et al.
patent: 6950192 (2005-09-01), Hill
patent: 7012700 (2006-03-01), de Groot et al.
patent: 7038850 (2006-05-01), Chang et al.
patent: 7075619 (2006-07-01), Hill
patent: 7106454 (2006-09-01), de Groot et al.
patent: 7139081 (2006-11-01), de Groot
patent: 7268888 (2007-09-01), Hill
patent: 7280223 (2007-10-01), Hill
patent: 7280224 (2007-10-01), Hill
patent: 7283248 (2007-10-01), Hill
patent: 7362446 (2008-04-01), Van Der Pasch et al.
patent: 7528961 (2009-05-01), Hill
patent: 2003/0048458 (2003-03-01), Mieher et al.
patent: 2003/0164948 (2003-09-01), Hill
patent: 2003/0179357 (2003-09-01), Ravensbergen
patent: 2004/0263846 (2004-12-01), Kwan
patent: 2005/0018162 (2005-01-01), Leenders et al.
patent: 2005/0151951 (2005-07-01), Hill
patent: 2006/0256346 (2006-11-01), Hill
patent: 2008/0285051 (2008-11-01), Hill
patent: 0 843 152 (1998-05-01), None
patent: 60-225005 (1985-11-01), None
patent: 64-18002 (1989-01-01), None
patent: 11-108614 (1999-04-01), None
patent: 11-230716 (1999-08-01), None
patent: WO 00/65302 (2000-11-01), None
International Search Report.
International Preliminary Report on Patentability issued on Jun. 24, 2009, corresponding to Int'l. Appln. No. PCT/US2007/088708, filed Dec. 21, 2007.
U.S. Appl. No. 60/859,348, filed Nov. 2006, Hill.
U.S. Appl. No. 60/859,693, filed Nov. 2006, Hill.
U.S. Appl. No. 60/862,949, filed Oct. 2006, Hill.
U.S. Appl. No. 60/869,483, filed Dec. 2006, Hill.
U.S. Appl. No. 60/869,482, filed Dec. 2006, Hill.
U.S. Appl. No. 10/218,968, filed Aug. 2002, Byoung-Sun Na.
Lis, Steven A.,“An Air Turbulence Compensated Interferometer for IC Manufacturing,” SPIE 2440, [p. 467 (1995).
Arfken, G. “Gibbs Phenomenon”, Mathematical Methods For Physicists, Academic Press (1966).
Bobroff, N., “Residual Errors In Laser Interferometry From Air Turbulence And Nonlinearity”, Appl. Opt 26(13), pp. 907-926 (1987).
Bobroff, N., “Recent Advances In Displacement Measuring Interferometry,” Measurement Science & Tech. 4(9), pp. 907-926 (1993).
Estler, W.T., “High-Accuracy Displacement Interferometry In Air,” Appl. Opt. 24(6), pp. 808-815 (1985).
Jones, F.E., “The Refractivity Of Air”, J. Res. NBS 86(1), pp. 27-32 (1981).
Ishida, Akira, “Two Wavelength Displacement-Measuring Interferometer Using Second-Harmonic Light To Eliminate Air-Turbulence-Induced Errors,” Jpn. J. Appl. Phys. 28(3), L473-475 (1989).
Zanoni, C., “Differential Interferometer arrangements for distance and angle measurements: Principles, advantages and applications”, VDI Berichte Nr. 749, pp. 93-106 (1989).
Zhu, Y. et al., “Long-Arm Two-Color Interferometer For Measuring The Change Of Air Refractive Index,” SPIE 1319, Optics in Complex Systems, pp. 538-539 (1990).
International Search Report and Written Opinion for Int'l. Appln. No. PCT/US2006/043494 dated Mar. 20, 2008.
Chowdhury Tarifur
Cook Jonathon D
Fish & Richardson P.C.
Zygo Corporation
LandOfFree
Multiple-degree of freedom interferometer with compensation... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Multiple-degree of freedom interferometer with compensation..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multiple-degree of freedom interferometer with compensation... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4218800