Optics: measuring and testing – By particle light scattering – With photocell detection
Patent
1994-02-01
1995-10-17
Turner, Samuel A.
Optics: measuring and testing
By particle light scattering
With photocell detection
356358, G01B 902
Patent
active
054595711
ABSTRACT:
A phase-modulated interferometer has improved control and signal processing. Superimposition signals capable of evaluation in a phase-modulated interferometer without a complicated sawtooth control of the phase modulator are attained, in that two sinusoidal control signals which have modulation frequencies (.omega..sub.1, .omega..sub.2) and are rigidly coupled with respect to phase and frequency are applied to the known phase modulator and a cosine signal which is used in a conventional manner for evaluating the phase displacement is filtered of the superimposition signal generated in the interferometer by an electronic bandpass filter. At the filter frequency (.omega..sub.F) of the bandpass filter, an odd-number harmonic and an even-number harmonic of the two modulation frequencies (.omega..sub.1, .omega..sub.2) have the same frequency, when the amplitudes (.phi..sub.1, .phi..sub.2) of the control signals satisfy the condition for the suitable operating point of the phase modulator. The improvement has application to phase-modulated interferometers, in particular, for precision distance measuring devices, preferably by the heterodyne evaluating method.
REFERENCES:
patent: 4422764 (1983-12-01), Eastman
patent: 5141315 (1992-08-01), Malvern
patent: 5212825 (1993-05-01), Layton
patent: 5216532 (1993-06-01), Taylor
patent: 5319438 (1994-06-01), Kiasaleh
Bauer Juergen
Dammann Ehrhard
Eisenberg Jason D.
Jenoptik GmbH
Turner Samuel A.
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