Multiple-coil electromagnet for magnetically orienting thin film

Details Multiple-coil electromagnet for magnetically orienting thin film Multiple-coil electromagnet for magnetically orienting thin film

1998-05-22

2000-03-28

Diamond, Alan

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429802, 20429804, 20429817, 20429841, 20429837, 335209, 335299, 335213, 335297, 335306, 335282, 118723FE, 118723FI, C14C 1435, H01F 500

Patent

active

060427078

ABSTRACT:
An electromagnet assembly magnetically orients a thin magnetic film deposited onto a surface of a substrate. The magnetic orientation can take place in a low-pressure processing environment such as during the deposition of the thin magnetic film or during a subsequent operation such as annealing. The electromagnet assembly includes a plate-shaped core located adjacent to the substrate and two or more electromagnetic coils that are wrapped in different directions around the core. Electrical currents conveyed through the electromagnetic coils are controlled for orienting a substantially uniaxial magnetic field throughout a range of angular positions in a plane of the substrate surface.

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