Multiple-axis gas flow type angular velocity sensor

Details Multiple-axis gas flow type angular velocity sensor Multiple-axis gas flow type angular velocity sensor

1995-03-23

1996-10-22

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7351403, 7320425, G01P 900

Patent

active

055678777

ABSTRACT:
A multiple-axis gas flow type angular velocity sensor which can accurately and stably detect the magnitude and direction of angular velocities acting in any direction on the sensor main body is provided by performing precision processing on semiconductor substrates using a photo engraving process, which is a process for producing semiconductors, and forming a plurality of pairs of thermosensitive resistor elements, a gas passage and a sensor case by laminating a plurality of semiconductor substrates.

REFERENCES:
patent: 3631729 (1972-01-01), Moore
patent: 3635095 (1972-01-01), Schuemann
patent: 4020699 (1977-05-01), Schaffer
patent: 4026159 (1977-05-01), Isakson et al.
patent: 4147063 (1979-04-01), Bower et al.
patent: 4156364 (1979-05-01), Hill
patent: 4254659 (1981-03-01), Benedetto et al.
patent: 4348900 (1982-09-01), Takahashi et al.
patent: 4407161 (1983-10-01), Ferrar
patent: 4408490 (1983-10-01), Takahashi et al.
patent: 4542650 (1985-09-01), Renken et al.
patent: 4584878 (1986-04-01), Katsuno
patent: 4592232 (1986-06-01), Moffatt et al.
patent: 4717891 (1988-01-01), Ichise et al.
patent: 4930349 (1990-06-01), Takahashi et al.
patent: 4951507 (1990-08-01), Takahashi et al.
patent: 5012676 (1991-05-01), Takahashi et al.
patent: 5107707 (1992-04-01), Takahashi et al.
patent: 5270960 (1993-12-01), Ikegami et al.
patent: 5385046 (1995-01-01), Yamakawa et al.
patent: 5438871 (1995-08-01), Hosoi et al.
patent: 5476820 (1995-12-01), Fueki et al.

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