Multiple apparent source optical imaging system

Details Multiple apparent source optical imaging system Multiple apparent source optical imaging system

1979-04-25

1980-12-23

Nelson, Peter A.

Illumination

Light source and modifier

Including reflector

362331, 362346, F21V 709

Patent

active

042413893

ABSTRACT:
A multiple apparent source optical imaging system is provided having a paraboloidal assembly of plane mirrors uniformly distributed in a ring about an anisotropic light source. The assembly compensates for source anisotropy and for diffraction effects by providing uniform distribution of light, as if the light originated from multiple apparent sources uniformly distributed in a selected annular fashion in a common apparent source plane. The assembly also includes a variable focus projection lens which, in conjunction with a selected source beam divergence angle, serves to minimize line-width error when objects, such as a mask and a semiconductor substrate, with a finite separation are illuminated. Substantially no loss in image intensity is occasioned by the system.

REFERENCES:
patent: 2378677 (1945-06-01), Anderson
patent: 2513961 (1950-07-01), Ostrom
patent: 2913570 (1959-11-01), Gough et al.
patent: 2968033 (1961-01-01), Krietzberg
patent: 3174397 (1965-03-01), Sandborn
patent: 3532424 (1970-10-01), Miles
patent: 3826913 (1974-07-01), Downing et al.
patent: 4035631 (1977-07-01), Day, Jr.

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