Multiple adaptable 3-dimensional ultra-high speed scanning...

Optics: measuring and testing – Plural test

Reexamination Certificate

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C356S326000

Reexamination Certificate

active

07110095

ABSTRACT:
A 3-dimensional ultra-high speed scanning system for organic and inorganic surface topography and spectrometry has a 3-dimensional head to scan an object to be analyzed. The scanning head is operatively associated with a path length variator which in turn is operatively connected to a single mode wavelength coupler. A light source and a photo detector are operatively connected to the wavelength coupler. A computer with software for data reduction and 3-dimensional representation are connected to both the light source and the photo detector to reveal scanning data of an object scanned by the scanning head. A spectrometer is alternately coupled to the photo detector.

REFERENCES:
patent: 6015969 (2000-01-01), Nathel et al.
patent: 6657727 (2003-12-01), Izatt et al.
J. Szydlo, et al., Air-Turbine Driven Low-Coherence Reflectometry at 28.6-kHz Scan Repetition Rate, 4 pages, Apr. 14, 1998.
J. Szydlo, et al., High-Speed Measurements in Optical Low-Coherence Refleftometry, 4 pages, Apr. 17, 1998.
J. Szydlo, et al, High Speed Depth Optical Scanner, 138 pages Lausanne, EPFL, Dec. 21, 2000.
ETH. Switzerland, Web Page; High Speed Optical Scanner, 1 page, 1/14/1003.

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