Electricity: measuring and testing – Using ionization effects – For monitoring pressure
Patent
1989-01-10
1990-02-20
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Using ionization effects
For monitoring pressure
324460, 324470, 328243, G01L 2132, G01N 2162
Patent
active
049029770
ABSTRACT:
A gas ionization type vacuum gauge for testing the internal vacuum levels to below 10.sup.-6 torr is disclosed which uses a multipactor discharge means as the source for the electron current used to ionize residual gas molecules. The invention comprises an RF field enhancing cavity which can be constructed of high-vacuum-compatible materials, able to withstand bake-out microwave temperatures and a negatively biased ion collection wave, wire, or grid. A simple ceramic RF feed-through permits simple and noninvasive pressure measurements. The device can be made much smaller than conventional gauges.
REFERENCES:
patent: 2071515 (1937-02-01), Farnsworth
patent: 2071517 (1937-02-01), Farnsworth
patent: 2884550 (1959-04-01), Lafferty
patent: 3521146 (1970-07-01), Forrer
patent: 3527939 (1970-09-01), Dawson
Baird J. Mark
Barnett Larry R.
Grow Richard W.
Kenny Michael B.
Cornaby K. S.
Eisenzopf Reinhard J.
Solis Jose M.
University of Utah
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