Coating processes – Electrical product produced – Metallic compound coating
Patent
1993-06-09
1995-01-10
Beck, Shrive
Coating processes
Electrical product produced
Metallic compound coating
427271, 427307, 427367, 4273767, 4274431, B05D 512
Patent
active
053805461
ABSTRACT:
A maskless process for forming a protected metal feature in a planar insulating layer of a substrate is disclosed. A first barrier material is disposed in a recess in an insulating layer, a conductive metal is disposed on the first barrier material such that the entire metal feature is positioned within the recess below the top of the recess, a second barrier material is disposed on the metal feature such that the second barrier material occupies the entire portion of the recess above the metal feature and extends above the top surface of the insulating layer, and the second barrier material is then polished until the top of the second barrier material is in and aligned with the top of the insulating layer. As a result, the metal feature is surrounded and protected by the first and second barrier materials, and the substrate is planarized.
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Krishnan Ajay
Kumar Nalin
Beck Shrive
Microelectronics and Computer Technology Corporation
Ruland James E.
Sigmond David M.
Utech Benjamin L.
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