Coating processes – Electrical product produced – Condenser or capacitor
Patent
1975-05-30
1977-05-10
Weiffenbach, Cameron K.
Coating processes
Electrical product produced
Condenser or capacitor
156665, 156659, 156656, 156657, 427 88, 427 90, 427 91, 427 93, 427 96, 427 99, B05D 512
Patent
active
040229300
ABSTRACT:
The specification describes a procedure for multilevel metallization of semiconductor integrated circuits in which the severity of the step formed by the edges of the first level pattern and the intermediate insulator over which the second level metallization pattern extends is reduced by beveling the edge. The bevel occurs during selective etching of the first level metal as a consequence of depositing the first level metal over a range of diminishing temperatures. Metal layers, notably aluminum, deposited in this way exhibit a differential etch rate such that the layer etches more slowly as etching proceeds through the thickness of the layer. Bevels of the order of 30.degree. to the horizontal can be produced in this way.
REFERENCES:
patent: 3413157 (1968-11-01), Kuiper
patent: 3579375 (1971-05-01), Wonilowicz et al.
patent: 3620837 (1971-11-01), Leff et al.
patent: 3672983 (1972-06-01), DeWitt et al.
patent: 3801477 (1974-04-01), Ronen et al.
patent: 3806361 (1974-04-01), Lehner
patent: 3825454 (1974-07-01), Kikuchi et al.
patent: 3855112 (1974-12-01), Tomozawa et al.
patent: 3909925 (1975-10-01), Forbes et al.
Bell Telephone Laboratories Incorporated
Weiffenbach Cameron K.
Wilde Peter V. D.
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