Multilayered structure and method of manufacturing the same,...

Details Multilayered structure and method of manufacturing the same,... Multilayered structure and method of manufacturing the same,...

2007-04-03

2007-04-03

Dougherty, Tom (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S364000, C029S025350, C029S594000

Reexamination Certificate

active

11030069

ABSTRACT:
A multilayered structure which includes insulating layers and electrode layers and can be easily arrayed. The multilayered structure is manufactured by using a substrate on which first and second groups of columnar structures are arranged in a predetermined arrangement, and includes: a first electrode layer formed by forming a film of a conducting material on the substrate or an insulating layer except for portions around the first group of columnar structures; an insulating layer formed by spraying powder of an insulating material on the first electrode layer to deposit the powder thereon; a second electrode layer formed by forming a film of a conducting material on the insulating layer except for portions around the second group of columnar structures; and interconnections formed by filing, with a conducting material, holes formed by removing the columnar structures from the substrate.

REFERENCES:
patent: 4845399 (1989-07-01), Yasuda et al.
patent: 6114798 (2000-09-01), Maruyama et al.
patent: 6757947 (2004-07-01), Seipler et al.
patent: 6-291380 (1994-10-01), None

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