Multilayered magnetic sensor having conductive layer within megn

Details Multilayered magnetic sensor having conductive layer within megn Multilayered magnetic sensor having conductive layer within megn

1996-03-14

1998-11-17

Strecker, Gerard R.

Electricity: measuring and testing

Magnetic

Magnetometers

324260, G01R 3302

Patent

active

058381546

ABSTRACT:
A magnetic sensor element 1 includes a substrate 10, a conductive layer 12 of a conductive material, and a magnetic layer 11 of a magnetic material, which encloses the conductive layer 12. AC is applied to the element from a drive power source 50, and a detector 60 detects an impedance change due to an external magnetic field. The magnetic layer 11 is bestowed with magnetic anisotropy in a direction orthogonal to the direction of energization of the element 1. With the provision of the conductive layer 12 of conductive material and also with magnetic anisotropy imparted to the magnetic layer 1, the element 1 may be made a low resistivity element. A reactance change and a resistance change of the element due to an external magnetic field change, thus can be effectively detected in drive frequencies two orders of magnitude lower than in the case of a prior art magnetic sensor element. The magnetic anisotropy of the magnetic layer 11 is controlled to prevent magnetic field detection dynamic range variations with drive frequency.

REFERENCES:
patent: 3421075 (1969-01-01), Belson
patent: 4635152 (1987-01-01), Iwasaki et al.
patent: 5365391 (1994-11-01), Sugiyama et al.
Iwasaki et al; "Film Thickness . . . Using Induced RF Permeability Change," IEEE Transactions on Magnetics, vol. MAG-23, No. 5, Sep. 1987, pp. 2506-2508.
Senda et al; "High frequency measurement technique . . . magnetic film inductance line", Rev. Sci. Instrum., 64, No. 4, Apr. 1993, pp. 1034-1037.

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