Multilayered gas sensor

Details Multilayered gas sensor Multilayered gas sensor

1999-02-11

2000-06-06

Williams, Hezron

Measuring and testing

Gas analysis

Detector detail

73 3105, 73 232, 73 2331, 422 90, 422 98, 204429, 338 34, G01N 2712, G01N 2500, G01N 2700, H01C 700

Patent

active

060704500

ABSTRACT:
The present invention provides a gas sensor element having physical, electrical and chemical properties capable of detecting methane and carbon monoxide selectively with 1 intergrated filtering, catalyzing sensor by improving gas selectivity of the semiconductor gas sensor. The present invention relates to a gas sensor element, which has a carbon monoxide sensor layer with an ability to function as a catalyst film that blocks carbon monoxide, which impedes detection of methane, and has a layer-built structure where the surface of a methane sensor is covered with the carbon monoxide gas sensor which can be obtained by a gas-phase method.

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