Multilayer Ti-Al-N coating for tools

Details Multilayer Ti-Al-N coating for tools Multilayer Ti-Al-N coating for tools

1991-08-19

1994-07-19

Turner, A. A.

Stock material or miscellaneous articles

Composite

Of inorganic material

428212, 428336, 428698, 428699, 51295, 51307, 407117, B23B 5100

Patent

active

053308530

ABSTRACT:
Surface coating includes alternating first and second ternary layers, wherein the first layer TiAlN.sub.x has a higher nitrogen content and is considerably thinner than the second layer TiAlNy. The first layer is preferably applied by decreasing the nitrogen content of a reactive atmosphere from a maximum to a minimum during sputtering of a TiAl target. The second layer is then applied by sputtering the TiAl target over a longer period of time while the nitrogen content is maintained constant at the minimum. When a further first layer is applied, the nitrogen is again increased to the maximum.

REFERENCES:
patent: 4714660 (1987-12-01), Gates, Jr.
patent: 4753854 (1988-06-01), Gavrilov et al.
patent: 4842710 (1989-06-01), Freller
patent: 4892791 (1990-01-01), Watanabe et al.
patent: 4984940 (1991-01-01), Bryant et al.
Beerish-Marchwicka et al "Structure of Thin Films Prepared by Cosputtering of Titanium and Aluminum or Titanium and Silicon" Thin Solid Films, 82 (1981) pp. 313-320.
Quinbo et al. "High Temperature Microhardness of Hard Coatings Produced by Physical and Chemical Vapor Deposition" Thin Solid Films, 153 (1987) pp. 19-36.

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