Electrical resistors – Resistance value responsive to a condition – Current and/or voltage
Patent
1993-01-13
1994-02-15
Lateef, Marvin M.
Electrical resistors
Resistance value responsive to a condition
Current and/or voltage
338307, 338310, 338322, 338329, H01C 710, H01C 1012
Patent
active
052870812
ABSTRACT:
Multilayer, thin film multijunction integrated micropotentiometers are formed in an integral multifilm membrane form over a through opening in a nonmagnetic, dielectric substrate. Through the use of conventional photolithographic and etching techniques, integrated structures are formed to include either single elongate heater elements, bifilar heater elements, or trifilar heater elements with multiple return paths. Multijunction thermopiles and resistors are formed with the heater. The individual layers of silicon oxide or silicon nitride, are formed with conventional chemical vapor deposition, sputtering and other known techniques.
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Huang De-xiang
Kinard Joseph R.
Novotny Donald B.
Lateef Marvin M.
The United States of America as represented by the Secretary of
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