Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Reexamination Certificate
2008-07-30
2010-02-23
Porta, David P (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
C257SE21001
Reexamination Certificate
active
07667202
ABSTRACT:
Provided are a multilayer-structured bolometer and a method of fabricating the same. In the multilayer-structured bolometer, the number of support arms supporting the body of a sensor structure is reduced to one, and two electrodes are formed on the one support arm. Thus, the sensor structure is electrically connected with a substrate through the only one support arm. According to the multilayer-structured bolometer and method of fabricating the bolometer, the thermal conductivity of the sensor structure is considerably reduced to remarkably improve sensitivity to temperature, and also the pixel size of the bolometer is reduced to obtain high-resolution thermal images. In addition, the multilayer-structured bolometer can have a high fill-factor due to a sufficiently large infrared-absorbing layer, and thus can improve infrared absorbance.
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Cheon Sang Hoon
Cho Seong Mok
Choi Chang Auck
Ryu Ho Jun
Yang Woo Seok
Boosalis Faye
Electronics & Telecommunications Research Institute
Porta David P
Rabin & Berdo P.C.
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