Multilayer silicon over insulator device

Details Multilayer silicon over insulator device Multilayer silicon over insulator device

2004-08-30

2008-03-25

Smith, Zandra V. (Department: 2822)

Active solid-state devices (e.g., transistors, solid-state diode

Physical configuration of semiconductor

With specified crystal plane or axis

C257S074000, C257S903000, C438S150000, C438S198000

Reexamination Certificate

active

07348658

ABSTRACT:
An apparatus and method for a multilayer silicon over insulator (SOI) device is provided. In the multilayer SOI device, the crystal orientation of at least one active region of a device is different than the active region of at least another device. Where the multilayer SOI device has a first layer including a PMOS device with a silicon active region having a crystal orientation of [100], the second layer may be an NMOS device with a active region having a silicon layer having a crystal orientation of [110]. The second layer is bonded to the first layer. The method and apparatus can be extended to more than two layers thus forming a multilayer SOI device having a different crystal orientation at each layer. The multiple layer SOI device may form circuits of reduced surface area.

REFERENCES:
patent: 5384473 (1995-01-01), Yoshikawa et al.
patent: 5880010 (1999-03-01), Davidson
patent: 5976953 (1999-11-01), Zavracky et al.
patent: 6509639 (2003-01-01), Lin
patent: 6544837 (2003-04-01), Divakauni et al.
patent: 6624046 (2003-09-01), Zavracky et al.
patent: 6821826 (2004-11-01), Chan et al.
patent: 2003/0148590 (2003-08-01), Kellar et al.
patent: 2004/0144979 (2004-07-01), Bhattacharyya

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