Multilayer reflective film coated substrate, manufacturing...

Details Multilayer reflective film coated substrate, manufacturing... Multilayer reflective film coated substrate, manufacturing...

2006-10-16

2011-12-20

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S359000, C359S586000, C359S590000

Reexamination Certificate

active

08081384

ABSTRACT:
A multilayer reflective film coated substrate includes a multilayer under film comprised of Mo/Si alternately-layered films, an intermediate layer in the form of a Si film, and a multilayer reflective film comprised of Mo/Si alternately-layered films for reflecting exposure light. The multilayer under film, the intermediate layer, and the multilayer reflective film are formed on a substrate in this order. Given that a cycle length of the multilayer under film is d bottom (unit:nm), a thickness of the intermediate layer is d Si (unit:nm), and a cycle length of the multilayer reflective film is d top (unit:nm), relationships of a formula (1) and a formula (2) are satisfied,the formula (1) given byin-line-formulae description="In-line Formulae" end="lead"?n×dtop−0.05≦dbottom≦n×dtop+0.05in-line-formulae description="In-line Formulae" end="tail"?where n is a natural number equal to or greater than 1, andthe formula (2) given byin-line-formulae description="In-line Formulae" end="lead"?m×dtop−1.2≦dSi≦−m×dtop+1.2in-line-formulae description="In-line Formulae" end="tail"?where m is an integer equal to or greater than 0.

REFERENCES:
patent: 5485497 (1996-01-01), Oizumi et al.
patent: 2004/0231980 (2004-11-01), Takahashi
patent: 2005/0157384 (2005-07-01), Shiraishi et al.
patent: 8-213303 (1996-08-01), None
patent: 11305417 (1999-11-01), None
patent: 2002313694 (2002-10-01), None
patent: 2003-515794 (2003-05-01), None
patent: 2004339547 (2004-12-01), None
patent: 2007073949 (2007-03-01), None
patent: 2007108516 (2007-04-01), None
Japanese Office Action corresponding to Japanese Patent Application No. 2005-300575, dated Apr. 23, 2010.

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