Multilayer protective coating for a substrate, process for prote

Details Multilayer protective coating for a substrate, process for prote Multilayer protective coating for a substrate, process for prote

1989-05-11

1992-05-26

Robinson, Ellis P.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

428212, 428336, 428412, 428446, 428447, 428698, 428702, 428704, B32B 702

Patent

active

051166658

ABSTRACT:
The present invention relates to a multilayer protective coating for a substrate and a process for protecting a substrate by the deposition of a continuous, transparent, amorphous, inorganic coating essentially comprising silicon, carbon, nitrogen, oxygen and hydrogen by means of a plasma. The invention also concerns the application of the coatings according to the invention in the protection of substrates and in particular against electrostatic charges.

REFERENCES:
patent: 4239819 (1980-12-01), Holzl
patent: 4289822 (1981-09-01), Shimada et al.
patent: 4443529 (1984-04-01), Kanba et al.
patent: 4460669 (1984-07-01), Ogawa et al.
patent: 4485146 (1984-11-01), Mizuhashi et al.
patent: 4486521 (1984-12-01), Misumi et al.
patent: 4489149 (1984-12-01), Kawamura et al.
patent: 4490454 (1984-12-01), Misumi et al.
patent: 4499331 (1985-02-01), Hamakawa et al.
patent: 4546008 (1985-10-01), Saitoh et al.
patent: 4547448 (1985-10-01), Shirai et al.
patent: 4555464 (1985-11-01), Kido et al.
patent: 4632894 (1986-12-01), Ohashi et al.
patent: 4645684 (1987-02-01), Osada et al.
patent: 4661427 (1987-04-01), Kangi
patent: 4666808 (1987-05-01), Kawamura et al.
patent: 4668365 (1987-05-01), Foster et al.
patent: 4721631 (1988-01-01), Endo et al.
patent: 4777090 (1988-10-01), Oushinsky et al.
patent: 4841328 (1989-06-01), Takeuchi et al.
patent: 4847157 (1989-07-01), Goodman et al.,
J. Electrochem Soc., 128, 1555-1563 (Jul. 1981)-Dun et al., "Mechanisms of Plasma-Enhanced Silicon Nitride Desposition Using SiH.sub.4 /N Mixture".

Affiliated with

Also associated with

Rating

Multilayer protective coating for a substrate, process for prote does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multilayer protective coating for a substrate, process for prote, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multilayer protective coating for a substrate, process for prote will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-418517