Multilayer nanolaminates containing polycrystalline zirconia

Details Multilayer nanolaminates containing polycrystalline zirconia Multilayer nanolaminates containing polycrystalline zirconia

1994-06-27

1995-12-05

Ryan, Patrick J.

Stock material or miscellaneous articles

All metal or with adjacent metals

Composite; i.e., plural, adjacent, spatially distinct metal...

428610, 428627, 428632, 428635, 428698, 428702, B32B 900

Patent

active

054727952

ABSTRACT:
Layers of zirconium oxide and another ceramic, such as alumina or silicon carbide, are sequentially deposited on a support to form a nanolaminate containing a thin layer of polycrystalline metastable tetragonal zirconia deposited on the support. A process for making a nanolaminate material of the invention is carried out by sputter deposition. Zirconia is deposited on the chosen support by vacuum sputter deposition under conditions effective to form a thin layer of polycrystalline, metastable tetragonal zirconia on the support. A hard ceramic such as alumina is then deposited on the support by vacuum sputter deposition under conditions effective to form a thin layer of hard ceramic superposed on the zirconia layer.

REFERENCES:
patent: 4350729 (1982-09-01), Nakano et al.
patent: 4485151 (1984-11-01), Stecura
patent: 4525464 (1985-06-01), Claussen et al.
patent: 4532190 (1985-07-01), Kanbe et al.
patent: 4535033 (1985-08-01), Stecura
patent: 4724169 (1988-02-01), Keem et al.
patent: 4904542 (1990-02-01), Mroczkowski
patent: 4919778 (1990-04-01), Dietrich et al.
patent: 4940693 (1990-07-01), Shappirio et al.
patent: 5102697 (1992-04-01), Grunke et al.
patent: 5108846 (1992-04-01), Steininger
patent: 5192410 (1993-03-01), Ito et al.
patent: 5279722 (1994-01-01), Szczyrbowski et al.
"Design of High-Toughness Laminar Zirconia Composites," pp. 969-974, Ceramic Bulletin, vol. 71, No. 6, 1992.
"New Scientific Approaches to Development of Tool Materials," pp. 151-165, International Materials Reviews, vol. 33, No. 3, 1988.
"Phase Mapping Sputter Deposited Wide Band-Gap Metal Oxides," Proc. Mater, Res. Soc. 242, 737-42, 1992.
"Near-Band Gap Optical Behavior of Sputter Deposited .alpha.-and .alpha.+.beta.-ZrO.sub.2 Films," pp. 2756-2758, J. Appl. Phys. 66 (6), 15 Sep. 1989.
"Wear-Induced Phase Transformation in Yttria Stabilized Zirconia: X-Ray Photoelectron Spectroscopic Studies," pp. 1438-1440, Appl. Phys. Lett. 60 (12), 23 Mar. 1992.
"Phase Maps for Sputter Deposited Refractory Metal Oxide Ceramic Coatings: Review of Niobium Oxide, Yttrium Oxide, and Zirconium Oxide Growth," 666 Materials Science and Technology, Aug. 1992, vol. 8.
"Characterization Studies of Transformation-Toughened Ceramics," pp. 955-960, Ceramic Bulletin, vol. 71, No. 6, 1992.
"Indirect Band Gap in .alpha.-ZrO.sub.2," pp. 3345-3346, J. Vac. Sci. Technol. A8 (4), Jul./Aug. 1990.
"The Transition from .alpha.Zr to .alpha.ZrO.sub.2 Growth in Sputter-Deposited Films as a Function of Gas O.sub.2 Content, Rare-Gas Type, and Cathode Voltage," pp. 1235-1239, J. Vac. Sci. Technol. A 7 (3), May/Jun. 1989.
"Phase Formation in Sputter Deposited Metal (V, Nb, Zr, Y) Oxides: Relationship to Metal, Metal-Oxygen, and Oxygen Flux," pp. 1540-1547, J. Vac. Sci. Technol. A. 11 (4), Jul./Aug. 1993.

Affiliated with

Also associated with

Rating

Multilayer nanolaminates containing polycrystalline zirconia does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multilayer nanolaminates containing polycrystalline zirconia, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multilayer nanolaminates containing polycrystalline zirconia will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1373086