Multilayer mirror manufacturing method, optical system...

Details Multilayer mirror manufacturing method, optical system... Multilayer mirror manufacturing method, optical system...

2006-10-10

2009-06-09

Shafer, Ricky D (Department: 2872)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S848000, C359S883000, C359S900000, C359S584000

Reexamination Certificate

active

07543948

ABSTRACT:
A method for manufacturing a multilayer mirror that includes a substrate and a multilayer film formed on the substrate, and has a reflection surface shape includes the steps of estimating a surface shape variation amount as a difference between a surface shape of the substrate before the multilayer film is formed on the substrate and a surface shape of the multilayer mirror after the multilayer film is formed on the substrate, processing the surface shape of the substrate into a shape generated by subtracting the surface shape variation amount from the reflection surface shape, and forming the multilayer film on the substrate processed by the processing step.

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