Radiant energy – Photocells; circuits and apparatus – Photocell controlled circuit
Patent
1993-02-16
1994-04-26
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controlled circuit
313533, H01J 3906
Patent
active
053069048
ABSTRACT:
A muitilayer microelectronic photomultiplier device is fabricated by disce procedures to provide a photocathodeanode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This multilayer microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors with high packing densities due to the inherently stacked geometry offering improved performance and design flexibility.
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Russell Stephen D.
Shimabukuro Randy L.
Fendelman Harvey
Keough Thomas Glenn
Lee John R.
Nelms David C.
The United States of America as represented by the Secretary of
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