Multilayer microelectronic circuit with trimmable capacitors

Details Multilayer microelectronic circuit with trimmable capacitors Multilayer microelectronic circuit with trimmable capacitors

1998-02-26

2000-09-05

Reichard, Dean A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613063, 361312, 3613212, 333184, 333185, H01G 4005, H01G 4228

Patent

active

06115234&

ABSTRACT:
The multilayer microelectronic circuit comprises a main capacitor dielectric layer, a main capacitor first electrode disposed on one of opposite sides of the main capacitor dielectric layer, a main capacitor second electrode disposed on the other of the opposite sides of the main capacitor dielectric layer in a way as to oppose the main capacitor first electrode through the main capacitor dielectric layer, a first trimming capacitor dielectric layer disposed on a side of the main capacitor first electrode opposite to the main capacitor dielectric layer, a first trimming capacitor electrode disposed on a side of the first trimming capacitor dielectric layer opposite to the main capacitor first electrode in a way as to oppose the main capacitor first electrode through the first trimming capacitor dielectric layer, a second trimming capacitor dielectric layer disposed on a side of the first trimming capacitor electrode opposite to the first trimming capacitor dielectric layer, and a second trimming capacitor electrode disposed on a side of the second trimming capacitor dielectric layer opposite to the first trimming capacitor electrode in a way as to oppose the first trimming capacitor electrode through the second trimming capacitor dielectric layer. The first trimming capacitor electrode is first trimmed for rough adjustment of a capacitance of the circuit. The second trimming capacitor electrode is then trimmed for fine adjustment of the capacitance.

REFERENCES:
patent: 4470096 (1984-09-01), Guertin
patent: 5347423 (1994-09-01), deNeuf
patent: 5523729 (1996-06-01), Nakai et al.
patent: 5604658 (1997-02-01), Pedder

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