Multilayer glass passivation structure and method for forming th

Details Multilayer glass passivation structure and method for forming th Multilayer glass passivation structure and method for forming th

1985-08-14

1990-11-20

Carroll, J.

357 52, 357 73, H01L 2934, H01L 2329

Patent

active

049722514

ABSTRACT:
A thick glass passivation layer comprises an alternating sequence of structurally dissimilar but chemically compatible layers of material over the surface of a substrate, so as to provide sufficient elasticity to compensate for thermal expansion differences that would otherwise crack causing in thick monolithic films. A first layer comprises glass that has been deposited over the surface of the structure using chemical vapor deposition. A second layer of the passivating glass material is then provided on the substrate using a spinning technique. The chemical vapor deposition and spun layers continue to be applied in an alternating fashion until a film having the desired thickness is formed. Each chemical vapor deposition layer provides an elastic cushion for the subsequently spun layers. The spun layers allows a planar topography to be maintained without the need for high temperatures.

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patent: 4497108 (1985-02-01), Kurosawa
patent: 4514233 (1985-04-01), Kawabuchi
patent: 4542400 (1985-09-01), Hiraki et al.
patent: 4654269 (1987-03-01), Lehrer
"Accuglass 203 Experimental Spin-On Glass Material", Preliminary Information Bulletin by Allied Chemical, DS-83111-B, Nov. 1983.
Sakka et al., "Formation of Sheets and Coating Films from Alkoxide Solutions", Journal of Non-Crystalline Solids, 63 (1984), 223-235.

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