Multilayer getter structures and methods for making same

Details Multilayer getter structures and methods for making same Multilayer getter structures and methods for making same

2008-05-13

2010-06-29

Zimmerman, John J (Department: 1794)

Stock material or miscellaneous articles

All metal or with adjacent metals

Porous

C428S660000, C428S662000, C428S670000, C252S181600

Reexamination Certificate

active

07745014

ABSTRACT:
Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

REFERENCES:
patent: 3620645 (1971-11-01), Paolo della Porta et al.
patent: 4055686 (1977-10-01), Steinberg et al.
patent: 4312669 (1982-01-01), Boffito et al.
patent: 4925741 (1990-05-01), Wong
patent: 4977035 (1990-12-01), Travis et al.
patent: 4996002 (1991-02-01), Sandrock et al.
patent: 5453659 (1995-09-01), Wallace et al.
patent: 5688708 (1997-11-01), Kato et al.
patent: 5701008 (1997-12-01), Ray et al.
patent: 5879583 (1999-03-01), Conte et al.
patent: 5908579 (1999-06-01), Conte et al.
patent: 5961750 (1999-10-01), Boffito et al.
patent: 6110808 (2000-08-01), Saito
patent: 6468043 (2002-10-01), Benvenuti
patent: 6499354 (2002-12-01), Najafi et al.
patent: 6554970 (2003-04-01), Benvenuti
patent: 6559596 (2003-05-01), Arai et al.
patent: 6589599 (2003-07-01), Conte et al.
patent: 6620297 (2003-09-01), Conte et al.
patent: 6783696 (2004-08-01), Conte et al.
patent: 7122100 (2006-10-01), Conte et al.
patent: 2002/0093003 (2002-07-01), Conte et al.
patent: 2004/0169469 (2004-09-01), Hasegawa
patent: 1484586 (1977-09-01), None
patent: 10-314050 (1998-12-01), None
patent: 2002117839 (2002-04-01), None
patent: 10-2004-0013091 (2004-02-01), None
patent: 20040013091 (2004-02-01), None
patent: 2193254 (2002-11-01), None
patent: WO 98/37958 (1998-09-01), None
patent: WO 00/75950 (2000-12-01), None
patent: WO 02/27058 (2002-04-01), None
Benvenuti, C., et al., “Vacuum properties of TiZrV non-evaporable getter films”, Vacuum Elsever UK, vol. 60, No. 1-2, pp. 57-65 (Jan. 2001).
Benvenuti, C., et al., “Vacuum properties of palladium thin film coatings”, Vacuum Elsevier UK, vol. 73, No. 2, pp. 139-144 (Mar. 2004).
Abstract for JP 2002-117839, Apr. 2002.
Abstract for WO 9749109, Dec. 1997.
Abstract for RU 2193254, Nov. 2002.

Affiliated with

Also associated with

Rating

Multilayer getter structures and methods for making same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multilayer getter structures and methods for making same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multilayer getter structures and methods for making same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4190423