Multilayer getter structures and methods for making same

Details Multilayer getter structures and methods for making same Multilayer getter structures and methods for making same

2004-06-10

2008-08-19

Zimmerman, John J (Department: 1794)

Stock material or miscellaneous articles

All metal or with adjacent metals

Porous

C428S660000, C428S662000, C428S670000, C428S632000, C428S686000, C428S687000, C252S181100, C252S181600, C313S553000, C313S558000, C422S211000

Reexamination Certificate

active

07413814

ABSTRACT:
Getter multilayer structures are disclosed, embodiments of which include at least a layer of a non-evaporable getter alloy having a low activation temperature over a layer of a different non-evaporable getter material having high specific surface area, both preferably obtained by cathodic deposition. The multilayer NEG structures exhibit better gas sorbing characteristics and lower activation temperature lower than those of deposits made up of a single material. A process for manufacturing such structures includes depositing a first, high surface area NEG film on a support, and then depositing a thin over layer of low activation NEG film.

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