Multilayer film structure for soft X-ray optical elements

Details Multilayer film structure for soft X-ray optical elements Multilayer film structure for soft X-ray optical elements

1996-01-17

1999-08-31

Turner, Archene

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Structurally defined web or sheet

Including components having same physical characteristic in...

428701, 428702, 359586, 359587, 359589, C23C 1406

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059452048

ABSTRACT:
In order to provide a multilayer film structure for soft X-ray optical elements in which a high reflectivity can be attained in even a soft X-ray wavelength region of a wavelength of 10 nm or less including the wavelength range of water window zone, in a multilayer film structure for soft X-ray optical elements wherein a first thin film, being a different type of a second thin film, and the second thin film are piled up in layers to form a multi-layer film, at least one of the aforesaid first thin film and the aforesaid second thin film is made to be an oxide thin film.

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Patent Abstracts of Japan, vol. 018, No. 454 (P-1791), Aug. 24, 1994 & JP 06-148399 (May 27, 1994).
Patent Abstracts of Japan, vol. 95, No. 004, May 31, 1994, & MP 07-005298 (Jan. 10, 1995).

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