Multilayer film reflector for soft X-rays

Details Multilayer film reflector for soft X-rays Multilayer film reflector for soft X-rays

1993-04-14

1994-06-07

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 85, 378145, B32B 702

Patent

active

053196953

ABSTRACT:
On a substrate materials of different X-ray refractive indexes, for example, silicon (si) and molybdenum (Mo), are alternately deposited to form a multilayer film composed of silicon nd molybdenum layers and a hydrogenated interface layer is formed between each pair of adjacent layers.

REFERENCES:
patent: 4684565 (1987-08-01), Abeles et al.
"Diffusion in Mo/Si Multilayers; [etc]" by Loopstra et al LeVide Les Couches Minces, vol. 42, No. 236, Mar. 24, 1987, pp. 71-73.
"The Optical Band Gap of Multilayers of a Sci H and Alloys; [etc]" by Bernhard et al, Journal of Non-Crystalline Solids, vol. 137, No. 2, Dec. 1991, pp. 1103-1106.
"Structure of Si/SiO.sub.2 Thin Multilayers [etc]", by Yachi, Journal of Vacuum Science and Technology, Part A., vol. 7, No. 2, Mar. 2, 1989, pp. 159-161.
"Influence of Hydrogen Plasma in the Properties of a SiiH/a-Si C:H Interfaces" by Fantini et al, Proc. of 10th E.C. Photovoltaic Solar Energy Conf., Apr. 8-12, 1991, pp. 329-332.

Affiliated with

Also associated with

Rating

Multilayer film reflector for soft X-rays does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multilayer film reflector for soft X-rays, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multilayer film reflector for soft X-rays will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-799697