Multilayer film for X-rays

Details Multilayer film for X-rays Multilayer film for X-rays

1994-06-10

1996-06-18

Wong, Don

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 85, G21K 106

Patent

active

055286542

ABSTRACT:
A multilayer film for X-rays comprising two kinds of films having different refractive indices, deposited alternately, wherein one of said two kinds of films which has smaller refractive index consists of an alloy containing Co and Cr. The multilayer film is capable of being utilized as an optical element such as a reflection mirror or a reflection-type X-ray mask.

REFERENCES:
patent: 5216539 (1993-06-01), Boher et al.
patent: 5310603 (1994-05-01), Fukuda et al.
Fabrication and Evaluation of Cr-C Multilayer Mirrors for Soft X-Rays, M. Niibe et al., vol. 1720, pp. 208-216, 1992.
Journal of Applied Physics, Aug. 1, 1990, P. Ruterana et al., vol. 68, pp. 1033-1037, Aug. 1, 1990, "A Transmission Electron Microscopy Study of Low-Temperature Reaction at the Co-Si Interface."
Applied Optics, J. H. Underwood et al., vol. 20, No. 17, Sep. 1, 1981, "Layered Synthetic Microstructures as Bragg Diffractors for X-Rays and Extreme Ultraviolet: Theory and Predicted Performance."

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