Multilayer dielectric diffraction gratings

Details Multilayer dielectric diffraction gratings Multilayer dielectric diffraction gratings

1995-09-29

1999-05-25

Spyrou, Cassandra

Optical: systems and elements

Diffraction

From grating

359569, 359572, 359571, 359587, 430 5, G02B 518, G02B 110, G03F 900

Patent

active

059074361

ABSTRACT:
The design and fabrication of dielectric grating structures with high diffraction efficiency used in reflection or transmission is described. By forming a multilayer structure of alternating index dielectric materials and placing a grating structure on top of the multilayer, a diffraction grating of adjustable efficiency, and variable optical bandwidth can be obtained. Diffraction efficiency into the first order in reflection varying between 1 and 98 percent has been achieved by controlling the design of the multilayer and the depth, shape, and material comprising the grooves of the grating structure. Methods for fabricating these gratings without the use of ion etching techniques are described.

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J. M. Elson, Infrared light scattering surfaces covered with multiple dielectric overlays, Dec. 18, 1975, Applied Optics, vol. 16, No. 11, Nov. 1977, pp. 2872-2881.

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