Multilayer detector and method for sensing an electron beam

Details Multilayer detector and method for sensing an electron beam Multilayer detector and method for sensing an electron beam

2008-05-06

2008-05-06

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Irradiation of objects or material

Ion or electron beam irradiation

C250S397000

Reexamination Certificate

active

07368739

ABSTRACT:
A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.

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