Multilayer chemical mechanical polishing pad manufacturing...

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Reexamination Certificate

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C156S289000, C156S299000, C156S291000, C051S297000, C451S533000, C451S538000, C451S539000

Reexamination Certificate

active

07820005

ABSTRACT:
A method for making a multilayer chemical mechanical polishing pad comprising: providing a polishing layer, providing a subpad layer, optionally providing additional layers, providing an unset reactive hot melt adhesive, applying the unset reactive hot melt adhesive in a pattern on a surface of at least one of the layers, applying one of the other layers over the pattern of unset reactive hot melt adhesive, pressing the two layers together with the unset reactive hot melt adhesive interposed therebetween, allowing the unset reactive hot melt adhesive to set forming a reactive hot melt adhesive bond between the two layers.

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Copending U.S. Appl. No. 12/175,965, published Jan. 21, 2010.

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