Multilayer ceramics coatings from the ceramification of hydrogen

Details Multilayer ceramics coatings from the ceramification of hydrogen Multilayer ceramics coatings from the ceramification of hydrogen

1987-12-28

1989-07-11

Pianalto, Bernard

Stock material or miscellaneous articles

Composite

Of metal

427 38, 427 58, 427 99, 427123, 427240, 427249, 4272552, 4272557, 427346, 427404, 427421, 428688, 428704, B23B 1504

Patent

active

048471623

ABSTRACT:
Hydrogen silsesquioxane resin can be ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a ceramic coating on the surface of a substrate. The nitrified silica coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided silica with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.

REFERENCES:
patent: 3615272 (1971-10-01), Frye et al.
Frye, et al., "The Oligomeric Silsesquoxanes, (HSiO.sub.3/2).sub.n " (1970), J. Am. Chem. Soc., p. 5586.
Glaser, et al., "Effect of the H.sub.2 O/Teos Ratio Upon the Preparation and Nitridation of Silica Sol/Gel Films", (1984), J. of Non-crystalline Solids, 63, 209-221.
Brow and Pantano, "Thermochemical Nitridation of Microporous Silica Films in Ammonia", (1987), J. Am. Ceram. Soc., 70, 9-14.

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