Etching a substrate: processes – Nongaseous phase etching of substrate – Substrate is multilayered
Patent
1997-01-23
1998-07-28
Breneman, R. Bruce
Etching a substrate: processes
Nongaseous phase etching of substrate
Substrate is multilayered
156 89, 264614, B32B 1800
Patent
active
057858799
ABSTRACT:
An object is to densify an internal conductor of a multilayer ceramic part to thereby reduce a line loss, improve operating properties such as Q value, and reduce a variation thereof. To this end, an internal conductor paste which is composed of conductor powder, preferably silver or copper powder and optionally, a glass frit is stacked with dielectric ceramic material layers and co-fired at or above the melting point of the conductor.
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Fujii Tadao
Kawamura Keizou
Kobayashi Makoto
Kondoh Suguru
Miura Taro
Adjodha Michael E.
Breneman R. Bruce
TDK Corporation
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