Multilayer ceramic coatings from metal oxides and hydrogen silse

Details Multilayer ceramic coatings from metal oxides and hydrogen silse Multilayer ceramic coatings from metal oxides and hydrogen silse

1987-12-28

1989-07-18

Pianalto, Bernard

Stock material or miscellaneous articles

Composite

Of metal

427 38, 427 58, 427 99, 427240, 427249, 4272552, 4272557, 427346, 427380, 427404, 427421, 4274301, 428688, 428704, B32B 1504

Patent

active

048492965

ABSTRACT:
Mixtures of hydrogen silsesquioxane resin and metal oxide precursors such as acyloxy and alkoxy compounds of aluminum, zirconium, and titanium can be coated on substrates and subsequently ceramified at low temperature in the presence of ammonia, with or without platinum or rhodium catalysis, to form a nitrided ceramic coating on the surface of the substrate. The nitrided coatings produced are useful as interlevel dielectric films or for planarizing and protecting the surface of electronic devices. For further surface protection, overcoating the nitrided coating with an additional layer of a passivating ceramic material and a top layer of a barrier ceramic material is also described.

REFERENCES:
patent: 3615272 (1971-10-01), Frye et al.
Frye, et al., "The Oligomeric Silsesquioxanes, (HSiO.sub.3/2).sub.n " (1970), J. Am. Chem. Soc., p. 5586.
Glaser, et al., "Effect of the H.sub.2 O/Teos Ratio upon the Preparation and Nitridation of Silica Sol/Gel Films", (1984), J. of Non-Crystalline Solids, 63, 209-221.
Brow and Pantano, "Thermochemical Nitridation of Microporous Silica Films in Ammonia", (1987), J. Am. Ceram. Soc., 70, 9-14.

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