Multilayer array ultrasonic transducers

Details Multilayer array ultrasonic transducers Multilayer array ultrasonic transducers

1997-09-16

1998-11-10

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310336, H01L 4100

Patent

active

058348808

ABSTRACT:
A method for fabricating "1.5D" and "2D" multilayer ultrasonic transducer arrays employs dicing saw kerfs, which provide acoustic isolation between rows. The kerfs are metallized to provide electrical connection between surface electrode layers and buried internal electrode layers. A multilayer piezoceramic transducer element for a "1.5D" or "2D" array produced by this method has higher capacitance, and accordingly provides better transducer sensitivity, in comparison to a single layer element.

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