Multilayer antireflection coatings for grazing ultraviolet incid

Details Multilayer antireflection coatings for grazing ultraviolet incid Multilayer antireflection coatings for grazing ultraviolet incid

1998-01-22

2000-02-29

Raimund, Christopher

Stock material or miscellaneous articles

Composite

Of inorganic material

428432, 428913, 359586, 427164, 427166, B32B 900

Patent

active

06030717&

ABSTRACT:
Multilayer antireflection coatings are disclosed for grazing incident ultraviolet light having a large angle of incidence. The coatings comprise, from the medium side, layers of high-refractive-index material alternating with layers of low-refractive-index material. Each layer of the high-refractive-index material has the same optical thickness, and each layer of the low-refractive-index material has the same optical thickness. The multilayer antireflection coatings are effective in preventing reflection of p-polarized light, from optical elements coated with such a coating, having a wavelength of 150 nm.ltoreq..lambda..ltoreq.250 nm in a range of angle of incidence of 70.degree..ltoreq..theta..ltoreq.80.degree..

REFERENCES:
patent: 4556599 (1985-12-01), Sato et al.
patent: 4966437 (1990-10-01), Rahn

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