Multilayer absorbing antireflective coating

Details Multilayer absorbing antireflective coating Multilayer absorbing antireflective coating

1999-03-04

2000-08-29

Henry, Jon

Optical: systems and elements

Light interference

Produced by coating or lamina

359588, 359590, 427164, G02B 111, G02B 528, G02B 523, B05D 506

Patent

active

06111698&

ABSTRACT:
A reflection control member includes a multilayer stack that is adhered to a substrate using a primer layer to promote adhesion. The multilayer stack includes pairs of layers in which the first layer is a grey metal and the second layer is a substantially transparent material. In the preferred embodiment, the grey metal is nickel chromium and the transparent layer is a silicon oxide. For each pair of layers, the grey metal is nearer to the surface of the substrate for which antireflection is a concern. The primer layer has a thickness of less than 50 angstroms. Although the primer layer is deposited in an essentially oxygen-free environment, it may oxidize following deposition.

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patent: 5521759 (1996-05-01), Dobrowolski et al.
patent: 5691044 (1997-11-01), Oyama et al.
patent: 5744277 (1998-04-01), Bright et al.

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