Optical: systems and elements – Mirror – Plural mirrors or reflecting surfaces
Reexamination Certificate
2006-01-10
2006-01-10
Robinson, Mark A. (Department: 2872)
Optical: systems and elements
Mirror
Plural mirrors or reflecting surfaces
C359S903000
Reexamination Certificate
active
06984051
ABSTRACT:
A multifaceted reflecting mirror is provided with a plurality of reflecting mirror elements10and a base plate13for magnet, each of the plurality of reflecting mirror elements10comprising a reflecting surface19and a magnetic film17formed on a bottom surface. The respective reflecting mirror elements10can be positioned highly accurately on the base plate13by using a positioning guide15. The maintenance operation is easily performed as well, because the respective reflecting mirror elements10are detachable. When the multifaceted reflecting mirror is used in combination with another multifaceted reflecting mirror for an illumination optical system of a reflection type exposure apparatus which uses, as an exposure light beam, a light beam having a short wavelength such as soft X-ray, it is possible to illuminate an exposure area on a substrate with the light beam having an extremely uniform illumination intensity.
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Nikon Corporation
Oliff & Berridg,e PLC
Robinson Mark A.
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