Multidimensional force sensor

Details Multidimensional force sensor Multidimensional force sensor

1990-05-11

1992-04-07

Ruehl, Charles A.

Measuring and testing

Dynamometers

Responsive to force

73517R, 361278, 361280, G01L 114

Patent

active

051016699

ABSTRACT:
A multibeam structure measures displacement of one or more response elements to detect multiple components of applied force. The flexible beams are each coupled to a response element which may be displaced by a force arising from linear acceleration, angular acceleration, fluid flow, electric/magnetic/gravitational fields, and other sources. The displacement of the response element is detected with a variety of sensing methods including capacitive and piezoresistive sensing.

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patent: 4634965 (1987-01-01), Foote
Roylance, Lynn Michelle, and Angell, James B., "A Batch-Fabricated Silicon Accelerometer", IEEE Transactions on Electron Devices, vol. ED-26, No. 12 Dec. 1979, pp. 1911-1917.
Bassous, E., "Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) Silicon", IEEE Transactions on Electron Devices, vol. ED 25, No. 10, Oct. 1978.

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