Multicomponent alloy for sputtering targets

Details Multicomponent alloy for sputtering targets Multicomponent alloy for sputtering targets

1982-08-09

1984-08-21

Rosenberg, Peter D.

Alloys or metallic compositions

Gold base

420469, 420580, B32B 1504

Patent

active

044669402

ABSTRACT:
A multicomponent alloy for targets employed in the sputter coating of gold layers, said alloy having 35% to 55%, preferably either 50% or 42%, non-aurous alloy components.

REFERENCES:
patent: 1557431 (1925-10-01), Davignon
patent: 2015499 (1935-09-01), Smith
patent: 2243177 (1941-05-01), Weiss
patent: 2278812 (1942-04-01), Weiss
patent: 3769006 (1973-10-01), Ingersoll
patent: 4066819 (1978-01-01), Anderson

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