Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
1999-09-01
2001-06-26
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
With measuring or testing
C438S015000, C438S113000, C438S114000
Reexamination Certificate
active
06251695
ABSTRACT:
BACKGROUND
1. Field of the Invention
The present invention relates to semiconductor packaging, and more particularly, the present invention relates to multichip module packaging.
2. The Background Art
The term “multichip module” is commonly used to refer to an electronic component having multiple integrated circuit dies that, when electronically combined, function as a system- or board-level unit. As seen in
FIG. 1
, the creation of the module usually includes receiving 10 each of the integrated circuit die, such as die
12
and die
14
, in bare die form and attaching 16 each die to a suitable substrate
18
. After attachment, the input/output (I/O) pads of each die are coupled electrically
20
to the I/O pads of substrate
18
either through a wire bonding process or flip-chip process. (The flip-chip process is not shown). An encapsulation step
22
is then preformed, where the integrated circuit dies
12
and
14
, bonding wires
24
(if applicable), and substrate
18
are encapsulated by a protective material
26
, such as epoxy. Encapsulation protects the bare dies and provides a robust and compact package, or multichip module
28
, having all of the features that are offered by the combined integrated circuit dies.
At reference number
32
, pin-out
30
is formed on substrate
18
. Pin-out
30
is typically, but not always, formed opposite to the surface facing the attached integrated circuit die, and is for coupling electrically multichip module
28
to another substrate, such as a printed circuit board (not shown). Pin out
30
may be any high-density area connection (e.g., ball grid array, pin grid array or the like) or package configuration (e.g., dual in-line package (DIP), small out-line package (SOP), thin small out-line package (TSOP), small out-line J-lead (SOJ), quad flat pack (QFP), or the like). Multichip module
28
is then tested and burned-in to ensure proper operation (not shown).
FIG. 1
depicts the attachment and packaging of integrated circuit die onto a single substrate (shown in cross-section). Those of ordinary skill in the art will readily recognize that the substrate is typically part of a group of attached substrates (hereinafter referred to as a “substrate strip”). Hence, each of the substrates must be detached from the substrate strip after the formation of their corresponding multichip module but before testing and burn-in of each module. The entire substrate strip is not shown in
FIG. 1
to avoid overcomplicating the disclosure.
Multichip module packaging technology has the advantage of shortening circuit design time because the designer is not constrained to design the entire target circuit or fabricate the entire target circuit on a single silicon die. Instead, the designer can obtain all or some of the integrated circuits from semiconductor vendors that produce the integrated circuits required in bare die form. For example, a graphics designer seeking to directly couple RAM memory functions with a graphics accelerator may obtain a DRAM integrated circuit die from a DRAM vendor. The graphics designer may then combine the DRAM integrated circuit die with the designer's graphics integrated circuit die by packaging the die circuits in a multichip module. Thus, a designer can rapidly construct a target circuit by obtaining some integrated circuit portions required in the target circuit from available vendors in bare die form.
However, multichip module technology is relatively expensive because module yield is dependent on the yield of each of the integrated circuit dies combined in each multichip module. Since each integrated circuit die used is packaged with other dies before system testing, any one die failing after packaging results in a defective multichip module regardless of whether the remaining dies in the module are not defective. The susceptibility of die failure after packaging due to use (such as when burned-in and/or tested for a period of time) is commonly known as die infant mortality. Die infant mortality increases packaging costs because the remaining integrated circuit dies in the module have already been encapsulated with the defective die and thus, cannot be re-used. Consequently, all it takes is one defective integrated circuit die in a multichip module to render the entire multichip module defective.
There have been prior attempts in identifying before packaging non-defective integrated circuit bare die, i.e., integrated circuit die that has the same level of quality as a die that as been packaged, tested, and burned-in. Such a non-defective integrated circuit in bare die form is commonly referred to as “known good die”. One solution includes testing each integrated circuit in bare die form by placing the die in a suitable carrier or temporary package and then testing the circuit against a set of specified requirements. This solution is expensive because it includes using a temporary package or carrier, and inserting and removing the die from the temporary package or carrier.
In another approach, each integrated circuit die in bare die form is placed in a specialized and miniature test socket, tested, and burned-in before placement of each die onto the substrate. This requires strict tolerances because the I/O pads on the die must be aligned with the test carrier bare die sockets, which are used during die testing. In addition, this solution suffers from temperature and frequency limitations due to parasitic capacitance, cross talk, and cost.
Accordingly, there exists a need for an improved method of packaging integrated circuit dies into a multichip module.
SUMMARY
The present invention is a method of packaging and testing integrated circuit dies that are coupled to a substrate. The method includes coupling a first integrated circuit to the substrate; encapsulating the first integrated circuit; and then testing the first integrated circuit. If testing is successful, a second integrated circuit is coupled to the substrate.
In addition, the method may include encapsulating the second integrated circuit so that the first and second integrated circuits are part of a single monolithic module, such as a multichip module. The second integrated circuit may also be tested after encapsulation. The present invention may also be practiced by encapsulating and testing lesser value die before encapsulating higher value die. This reduces the chance that a higher value die will be rendered unusable because one of the lower value dies attached to the substrate is subsequently found defective after the higher value die has been encapsulated and/or tested.
REFERENCES:
patent: 4344064 (1982-08-01), Bitler et al.
patent: 5280193 (1994-01-01), Lin et al.
patent: 5754410 (1998-05-01), Bardsley et al.
patent: 6117693 (2000-09-01), Fogal et al.
patent: 04 322 439 (1992-11-01), None
patent: 05 074 829 (1993-03-01), None
Carr & Ferrell LLP
Le Dung A
Nelms David
S3 Graphics Co., Ltd.
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