Multibeam laser drilling apparatus

Details Multibeam laser drilling apparatus Multibeam laser drilling apparatus

2005-02-01

2005-02-01

Evans, Geoffrey S. (Department: 1725)

Electric heating

Metal heating

By arc

C219S121730, C219S121770

Reexamination Certificate

active

06849824

ABSTRACT:
Provided is a multi-beam laser drilling apparatus for drilling a workpiece, simultaneously at two positions while telecentric errors are suppressed, in which a conventional optical system in which galvanometer mirrors are used for a first laser beam, and a galvanometer-mirror system is located close to an fθ lens in order to prevent occurrence of telecentric error. A second laser beam which has been deflected by a second galvanometer-mirror system, transmits through a polarized beam mixers and is incident upon the first galvanometer-mirror system and the fθ lens, and accordingly, the workpiece is drilled simultaneously at two positions with the use of both first and second laser beams.

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