Multiaxis laser interferometry distance measuring device

Details Multiaxis laser interferometry distance measuring device Multiaxis laser interferometry distance measuring device

1996-10-21

1998-10-27

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356351, G01B 902

Patent

active

058284567

ABSTRACT:
Interferometer 14 is equipped with a beam directing mechanism portion for causing the incoming laser beam to be reflected in the x, y, and z axis directions and a switching mechanism for the beam directing mechanism portion. Computer 20 provides driving commands sequentially to NC controller 22 in accordance with the contents of a measurement program to thereby operate milling machine A in accordance with a prescribed procedure, calculates correction data by comparing the distance measurement data, obtained at the beam source portion 12, with reference data, causes the correction value to be taken into NC controller 22, and starts up controller 24 and operates the switching mechanism of the multiaxis interferometer 14 after the end of work for each axis to change the axial direction measured.

REFERENCES:
patent: 4976019 (1990-12-01), Kitamura

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