Multi-zone real-time emissivity correction system

Details Multi-zone real-time emissivity correction system Multi-zone real-time emissivity correction system

1993-12-16

1995-08-22

Gutierrez, Diego F. F.

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

374128, 374 9, G01J 502, G01J 552, G01N 2500

Patent

active

054433150

ABSTRACT:
A multi-zone emissivity correction system and method that may be used in a multi-zone illuminator of a RTP-AVP system. The multi-zone illuminator comprises a plurality of lamps arranged in zones. A dummy lamp is also provided for each zone. A first plurality of sensors monitor the wafer and a second plurality of sensors monitor dummy lamp radiance. For each zone, an emissivity factor is determined based on the first and second pluralities of sensors. An effective black body radiance is also determined for each zone based on a wafer radiance factor for each zone and the emissivity factors.

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